Acta Photonica Sinica, Volume. 43, Issue 10, 1006003(2014)
Optic Fiber MEMS Pressure Sensor Based on White Light Interferometry
In order to achieve the measurement of the pressure in the harsh environment of strong electromagnetic interference, high temperature, high pressure, to further improve the miniaturization of sensors and reduce the cost of sensors,an optic fiber micro electro mechanical systems pressure sensor based on white light interferometry was produced. Fabry-Perot(F-P) cavity composed of silicon and glass was producted by the means of lithography, anodic bonding and chemical etching which was based on micro electro mechanical systems technology. F-P cavity with optical fibers were welded together through the carbon dioxide laser. The sensor was demodulated by the cross-correlation relationship between Fizeau interferometer and F-P cavity which is based on white-light interferometry techniques. Pressure sensor experimental was done,and the experimental results show that the sensor has a high sensitivity and linearity of 9.012 7 nm/kPa and 99.9%, respectively, the repeatability of sensor is 0.1%.The study has guiding significance for the production of low-cost and high-consistency fiber FP sensors.
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JIANG Xiao-feng, LIN Chun, XIE Hai-he, YAN Huang-ping, ZHANG Jian-cheng, HUANG Yuan-qing. Optic Fiber MEMS Pressure Sensor Based on White Light Interferometry[J]. Acta Photonica Sinica, 2014, 43(10): 1006003
Received: Feb. 26, 2014
Accepted: --
Published Online: Nov. 6, 2014
The Author Email: Xiao-feng JIANG (xiaofengjiang@yeah.net)