Chinese Journal of Lasers, Volume. 46, Issue 2, 0204001(2019)
Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System
A hardware-in-the-loop simulation platform for high-precision position measurement system based on two-dimensional grating is designed. The reasons for the error of the measurement model in the programming process are analyzed, and the simulation platform is used to test the accuracy and operation time of the measurement model. The results show that the accuracy of the measurement model is better than 0.79 nm when the calculated frequency is 20 kHz, and the error caused by simulation platform is 8.84×10 -7 nm. The simulation platform can effectively detect the errors generated by the measurement model based on the two-dimensional grating in the process of program realization, and test the operation time of the model.
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Wentao Zhang, Hao Du, Xianming Xiong, Renbiao Xie, Xianying Wang. Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System[J]. Chinese Journal of Lasers, 2019, 46(2): 0204001
Category: measurement and metrology
Received: Aug. 14, 2018
Accepted: Oct. 24, 2018
Published Online: May. 9, 2019
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