Chinese Journal of Lasers, Volume. 46, Issue 2, 0204001(2019)

Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System

Wentao Zhang1、*, Hao Du1,2, Xianming Xiong1, Renbiao Xie2, and Xianying Wang2
Author Affiliations
  • 1 Guilin University of Electronic Technology, Guilin, Guangxi 541004, China
  • 2 Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai 201203, China
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    A hardware-in-the-loop simulation platform for high-precision position measurement system based on two-dimensional grating is designed. The reasons for the error of the measurement model in the programming process are analyzed, and the simulation platform is used to test the accuracy and operation time of the measurement model. The results show that the accuracy of the measurement model is better than 0.79 nm when the calculated frequency is 20 kHz, and the error caused by simulation platform is 8.84×10 -7 nm. The simulation platform can effectively detect the errors generated by the measurement model based on the two-dimensional grating in the process of program realization, and test the operation time of the model.

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    Wentao Zhang, Hao Du, Xianming Xiong, Renbiao Xie, Xianying Wang. Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System[J]. Chinese Journal of Lasers, 2019, 46(2): 0204001

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    Paper Information

    Category: measurement and metrology

    Received: Aug. 14, 2018

    Accepted: Oct. 24, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0204001

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