Infrared and Laser Engineering, Volume. 48, Issue 2, 242001(2019)
Ultrashort pulse laser drilling of micro-holes(part 2)—experimental study
Since the invention of lasers in the 1960s, the pulse duration has been continuously shorten down to the sub-picosecond and even femtosecond regime. It makes the laser processing technology in the ultrashort pulse laser era. Compared with other methods, the ultrashort pulse laser drilling of micro-hole is independent of the size and materials, and it has the advantages of high precision and automation. The advantages, such as the "cold" processing, breaking the diffraction limit, for ultrashort pulse laser drilling of micro-hole were presented. Three classical models were demonstrated, which were the threshold fluence-hole diameter model, the multi-pulse cumulative model and the single-pulse ablation depth model. The experimental studies for ultrashort pulse laser drilling of micro-hole were analyzed. Furthermore, the challenging issues and prospects were concluded.
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Zhao Wanqin, Mei Xuesong, Wang Wenjun. Ultrashort pulse laser drilling of micro-holes(part 2)—experimental study[J]. Infrared and Laser Engineering, 2019, 48(2): 242001
Category: 光学制造与工艺
Received: Sep. 5, 2018
Accepted: Oct. 3, 2018
Published Online: Apr. 5, 2019
The Author Email: Wanqin Zhao (linazhaolinazhao@foxmail.com)