Laser & Optoelectronics Progress, Volume. 57, Issue 1, 011409(2020)

Multiple Factor Ion Implantation-Induced Quantum Well Intermixing Effect

Xiaohong Ge1,2, Ruiying Zhang2、*, Chunyang Guo2, Annan Li2, and Shuaida Wang2
Author Affiliations
  • 1Nano Science and Technology Institute, University of Science and Technology of China, Suzhou, Jiangsu 215123, China
  • 2Lightweight Laboratory of Advanced Materials Division, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu 215123, China
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    To realize InP-based monolithic integrated optoelectronic devices and systems, the quantum well intermixing (QWI) technology has been experimentally investigated for the InGaAsP/InGaAsP confinement heterojunction multiple quantum well laser structures herein. The active-area QWI technology realized under P-ion implantation with different energies, different rapid thermal annealing (RTA) conditions, and cycle annealing is investigated, and the experimental results are characterized using photoluminescence (PL) spectra. Experimental results show that the QWI effect can be observed for all the samples with different variables, where the annealing temperature has the most significant effect and the cycle annealing can further enhance the QWI effect. The blue-shift in PL spectra increases with the annealing temperature and time and implantation energy, and the annealing temperature has the greatest effect on the blue shift. Finally, the maximum blue-shift achieved is approximately 116 nm with secondary annealing at 750 ℃ for 150 s when the injection dose and energy are 1×10 14 ion/cm 2 and 600 keV, respectively. Our findings will benefit future design and fabrication of monolithic integrated optoelectronic devices and systems using QWI technology.

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    Xiaohong Ge, Ruiying Zhang, Chunyang Guo, Annan Li, Shuaida Wang. Multiple Factor Ion Implantation-Induced Quantum Well Intermixing Effect[J]. Laser & Optoelectronics Progress, 2020, 57(1): 011409

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Jun. 27, 2019

    Accepted: Jul. 16, 2019

    Published Online: Jan. 3, 2020

    The Author Email: Zhang Ruiying (ryzhang2008@sinano.ac.cn)

    DOI:10.3788/LOP57.011409

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