Laser & Optoelectronics Progress, Volume. 54, Issue 8, 82301(2017)
Integrated Design and Performance Test for Strain Type Piezoelectric Optical Deflector
A kind of strain feedback type piezoelectric optical deflector is presented. The mechanical structure and internal composition principle are firstly introduced for the optical deflector. Two strain feedback type piezoelectric actuators are integrated within the optical deflector, which is used to actuate the mirror and measure its angle displacement. An autocollimator is used to calibrate the deflector, and the obtained deflection accuracy is 0.05′. And then a series of tests are conducted to validate the positioning and tracking performances for both open and closed loop operations. Experimental results show that, the value of creep reaches 12.60% within 30 min and the tracking error for the varied-amplitude triangular-wave reaches 13.70% of the full scale in open loop mode. In closed loop mode, the creep effect is basically eliminated and the tracking error reaches 4.31% of the full scale. The designed piezoelectric optical deflector has good engineering application value for its reasonable structure and stable performance.
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Wang Geng, Zhou Kexin, Zhou Hong. Integrated Design and Performance Test for Strain Type Piezoelectric Optical Deflector[J]. Laser & Optoelectronics Progress, 2017, 54(8): 82301
Category: Optical Devices
Received: Feb. 23, 2017
Accepted: --
Published Online: Aug. 2, 2017
The Author Email: Geng Wang (wgmouse@163.com)