Acta Optica Sinica, Volume. 7, Issue 10, 957(1987)
A high repetition rate XeCl excimer laser
Configuration and performances of a high repetition rate XeCl exoimer laser are reported. A ceramio-metal grounded grid thyratron used as pulse switch, a transverse flow system, and a structure of fast transverse discharge of UV preionization are adopted in the laser system. The maximun output pulse energy is 200 mJ, maximum average power is 18 W at a repetition rate of 107 Hz.
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NAN YINGZI, WU HAIliN, WANG CHANSHAN, GENG XIULAN, Li YINKAI. A high repetition rate XeCl excimer laser[J]. Acta Optica Sinica, 1987, 7(10): 957
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