Micro-electro-mechanical (MEMS) resonator gyroscope is a kind of solid wave gyroscope, which is often fabricated by micro-nano fabrication technology, and has features of small size, low power consumption, low cost, and suitable for batch fabrication. Since the birth of the first hemispherical resonator gyroscope in the world in 1975, the structure topology of the MEMS resonator gyroscope has undergone a transformation from three-dimensional structure to two-dimensional structure. In this paper, the development of MEMS resonator gyroscope was summarized in the line of the development of topology. Finally, the current problems were analyzed and future development was prospected.