Optical Instruments, Volume. 41, Issue 2, 23(2019)
Error analysis of cone inner surface in the interferometric measurement
To achieve high-precision cone inner surface measurement, it is necessary to identify the cause of error and analyze the influence of the error on the measurement result. By building the mathematical model in the cylindrical coordinate system, the formulas of offset error and angle error are derived. The result shows that the optical path difference is caused obviously by offset error and angle error of cone mirror. When the offset is extremely small, the optical path difference changes linearly with the offset. The optical path is very sensitive to angle error. To ensure the measurement accuracy, the apex angle of cone mirror must be strictly controlled.
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HUANG Xin, WU Peng, TANG Shouhong, HAN Sen, LI Xueyuan, WANG Quanzhao. Error analysis of cone inner surface in the interferometric measurement[J]. Optical Instruments, 2019, 41(2): 23
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Received: May. 10, 2018
Accepted: --
Published Online: Jun. 22, 2019
The Author Email: Xin HUANG (jx_huangxin@qq.com)