Acta Optica Sinica, Volume. 28, Issue 10, 2031(2008)
Studay on Optical Property of DLC/Ag/DLC Multilayer Films
DLC/Ag/DLC multilayer films with different Ag and DLC thickness were prepared with high-vacuum magnetron sputtering. DLC layers were prepared by plasma enhanced chemical vaporation deposition method. The optical and electrical properties of samples were studied with a UV-vis pectrophotometer and a four-point probe,respectively. The results indicate that with the increase of the thickness of the Ag layer, the transmittance firstly increases and then decreases. With the increase of the thickness of the inner or outer DLC layer, the transmittance also firstly increases and then decreases. With the thickness of multilayer films up to DLC(30 nm)/Ag(16 nm)/DLC(40 nm), the film has a high optical transmittance of 94.4% at 550 nm and the electrical index is up to 112.4×10-3 Ω-1 which is much higher than that of the existing transparent optical conducting films (FTC≈20×10-3 Ω-1).
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Zhang Deheng, Xu Zhaofang, Li Boxun. Studay on Optical Property of DLC/Ag/DLC Multilayer Films[J]. Acta Optica Sinica, 2008, 28(10): 2031