Acta Optica Sinica, Volume. 32, Issue 1, 112002(2012)
Using a Laser Tracker to Measure the Surface of Off-Axis Aspheric Mirror During Grinding
In order to measure the off-axis aspheric surface before optical testing, method of using a laser tracker to measure the surface shape is investigated. The procedure and data processing method of the measurement are introduced. Using a commercial laser tracker, an off-axis parabolic mirror with an aperture of 150 mm, radius of curvature of 1200 mm, and off-axis distance of 240 mm is measured. The measurement uncertainty is analyzed and measurement result is compared with that of coordinate measuring machine. The result shows a peak-to-valley value consistency better than 1 μm. The method is easy operation and flexible, and meets the measurement requirements of the off-axis aspheric mirror surface before polishing.
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Li Jie, Wu Fan, Wu Shibin, Kuang Long, Lin Changqing. Using a Laser Tracker to Measure the Surface of Off-Axis Aspheric Mirror During Grinding[J]. Acta Optica Sinica, 2012, 32(1): 112002
Category: Instrumentation, Measurement and Metrology
Received: Jun. 3, 2011
Accepted: --
Published Online: Dec. 22, 2011
The Author Email: Jie Li (newuser9919@sohu.com.cn)