Acta Optica Sinica, Volume. 32, Issue 1, 112002(2012)

Using a Laser Tracker to Measure the Surface of Off-Axis Aspheric Mirror During Grinding

Li Jie1,2、*, Wu Fan1, Wu Shibin1, Kuang Long1, and Lin Changqing1
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  • 1[in Chinese]
  • 2[in Chinese]
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    In order to measure the off-axis aspheric surface before optical testing, method of using a laser tracker to measure the surface shape is investigated. The procedure and data processing method of the measurement are introduced. Using a commercial laser tracker, an off-axis parabolic mirror with an aperture of 150 mm, radius of curvature of 1200 mm, and off-axis distance of 240 mm is measured. The measurement uncertainty is analyzed and measurement result is compared with that of coordinate measuring machine. The result shows a peak-to-valley value consistency better than 1 μm. The method is easy operation and flexible, and meets the measurement requirements of the off-axis aspheric mirror surface before polishing.

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    Li Jie, Wu Fan, Wu Shibin, Kuang Long, Lin Changqing. Using a Laser Tracker to Measure the Surface of Off-Axis Aspheric Mirror During Grinding[J]. Acta Optica Sinica, 2012, 32(1): 112002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 3, 2011

    Accepted: --

    Published Online: Dec. 22, 2011

    The Author Email: Jie Li (newuser9919@sohu.com.cn)

    DOI:10.3788/aos201232.0112002

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