Acta Optica Sinica, Volume. 26, Issue 10, 1565(2006)

New TwoStep Etching Method Wiping off Crystal Tropism Influence in Laser-Induced Wet Chemical Etching

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    A new method, laserassisted wet twostep etching, which can wipe off the crystal tropism influence in laser induced wetchemical etching is proposed. The essential of this method is to lengthen the etching time in noncrystaltropism direction and assure the same etching degree as that in the crystaltropism direction. Theoretical analysis and experimental result show that the crystal tropism influences the etched image greatly; and the twostep method can wipe off the crystal tropism influence effectively; and also, compared with the adopted normally surface mask film and laser intensity distributing accommodation, the twostep etching method can deal with the inside crystal tropism influence, operate easily and the requirement for equipment is low. The laserassisted wet twostep etching can overcome the disadvantages of conventional ones, and wipe off the crystal tropism influence and is useful in the fabrication of specialstructured optoelectronic devices and optoelectronic integration.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. New TwoStep Etching Method Wiping off Crystal Tropism Influence in Laser-Induced Wet Chemical Etching[J]. Acta Optica Sinica, 2006, 26(10): 1565

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    Paper Information

    Category: OPTOELECTRONICS

    Received: --

    Accepted: --

    Published Online: Oct. 31, 2006

    The Author Email: (juanxiul@uestc.edu.cn)

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