Acta Optica Sinica, Volume. 39, Issue 9, 0905001(2019)
Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System
Two-dimensional (2D) gratings are the key elements of optical encoders in lithography machines. Herein, an ultra-precision laser direct writing system is proposed. Based on the ultra-precision platform, we obtain a 2D grating mask with grid line density of 1200 line/mm after double exposure by rotating the substrate by 90°. The atomic force microscopy and scanning electron microscopy images indicate that the profile of the 2D grating mask is clear and its spatial uniformity is excellent. These results demonstrate that the proposed ultra-precision laser direct writing system effectively fabricates a 2D grating mask, showing promise in the fabrication of large, high-precision 2D metrological gratings.
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Minkang Li, Xiansong Xiang, Changhe Zhou, Chunlong Wei, Wei Jia, Changcheng Xiang, Yunkai Lu, Shiyao Zhu. Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System[J]. Acta Optica Sinica, 2019, 39(9): 0905001
Category: Diffraction and Gratings
Received: Apr. 16, 2019
Accepted: May. 20, 2019
Published Online: Sep. 9, 2019
The Author Email: Zhou Changhe (chazhou@mail.shcnc.ac.cn)