Acta Optica Sinica, Volume. 39, Issue 9, 0905001(2019)

Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System

Minkang Li1,2, Xiansong Xiang1,2, Changhe Zhou1,2、*, Chunlong Wei1, Wei Jia3, Changcheng Xiang3, Yunkai Lu1,2, and Shiyao Zhu1,2
Author Affiliations
  • 1 Laboratory of Information Optics and Optoelectronics Techniques, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3 Institute of Photonics Technology, Jinan University, Guangzhou, Guangdong 511443, China
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    Two-dimensional (2D) gratings are the key elements of optical encoders in lithography machines. Herein, an ultra-precision laser direct writing system is proposed. Based on the ultra-precision platform, we obtain a 2D grating mask with grid line density of 1200 line/mm after double exposure by rotating the substrate by 90°. The atomic force microscopy and scanning electron microscopy images indicate that the profile of the 2D grating mask is clear and its spatial uniformity is excellent. These results demonstrate that the proposed ultra-precision laser direct writing system effectively fabricates a 2D grating mask, showing promise in the fabrication of large, high-precision 2D metrological gratings.

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    Minkang Li, Xiansong Xiang, Changhe Zhou, Chunlong Wei, Wei Jia, Changcheng Xiang, Yunkai Lu, Shiyao Zhu. Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System[J]. Acta Optica Sinica, 2019, 39(9): 0905001

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    Paper Information

    Category: Diffraction and Gratings

    Received: Apr. 16, 2019

    Accepted: May. 20, 2019

    Published Online: Sep. 9, 2019

    The Author Email: Zhou Changhe (chazhou@mail.shcnc.ac.cn)

    DOI:10.3788/AOS201939.0905001

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