Laser & Optoelectronics Progress, Volume. 59, Issue 11, 1122002(2022)

Large Depth-to-Diameter Ratio and Inverted Cone Micro-Hole Machining System with Controllable Trajectory and Its Application

Shan Wang1,2, Wei Zhao1, Hualong Zhao1、*, Feng Zhou3, Guoqiang Liu4, and Xiaojun Yang4、**
Author Affiliations
  • 1State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710119, Shaanxi , China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3FAW Wuxi Fuel Injection Equipment Research Institute, Wuxi 214063, Jiangsu , China
  • 4Xi’an Micromach Technology Co., Ltd., Xi’an 710119, Shaanxi , China
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    A femtosecond fiber laser is extensively used in the field of precision micro-hole manufacturing because of its short pulse width, high instantaneous power, and nonselectivity for processing materials. This study proposes a high-precision trajectory adjustable beam scanning system, which uses a motor to control the angle of the deflection wedge group and the parallel plate group relative to the laser optical axis. Then, it narrows the spot through a focusing lens to achieve precise control of femtosecond laser rotation scanning. Moreover, it solves the current problems of high depth-to-diameter ratio and difficult inverted taper hole machining. The system is applied for processing the oil hole of the automobile fuel injector, and the aperture of the processing aperture is 25—800 μm, and the aperture error is ≤±2 μm. A micro-hole taper can be achieved at -5°—+5° in taper hole processing. Micro-hole machining with a depth-to-diameter ratio of 20∶1 is achieved.

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    Shan Wang, Wei Zhao, Hualong Zhao, Feng Zhou, Guoqiang Liu, Xiaojun Yang. Large Depth-to-Diameter Ratio and Inverted Cone Micro-Hole Machining System with Controllable Trajectory and Its Application[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1122002

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Jun. 24, 2021

    Accepted: Jul. 14, 2021

    Published Online: Jun. 9, 2022

    The Author Email: Zhao Hualong (zhaohualong@opt.ac.cn), Yang Xiaojun (yxj@opt.ac.cn)

    DOI:10.3788/LOP202259.1122002

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