Journal of Applied Optics, Volume. 44, Issue 4, 842(2023)

Design of control system for double optical path interferometry

Xu JIA1...3, Sen HAN2,3,* and Quanying WU1 |Show fewer author(s)
Author Affiliations
  • 1School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou 215009, China
  • 2School of Optical-electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
  • 3Suzhou H&L Instruments LLC, Suzhou 215123, China
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    The traditional interferometry method of large-aperture optical element relies on artificially changing the beam expanding lens and optical path structure according to different test samples. This method inevitably introduces some systematic errors. Therefore, a set of corresponding dual-line control scheme was proposed according to the functional requirements of the dual-optical path interferometer and the simulation experiment. Through the cooperation of bluetooth communication, serial communication and mechanical structure, the optical path could be converted and calibrated for many times, so that the changing position of the optical element after each switch of the measurement diameter was fixed, and the real-time status was displayed in the interactive interface based on microsoft foundation classes (MFC). The results show that under 450 mm measurement diameter, the measurement repeatability of PV10 can reach 0.004 λ, and that of root-mean-square (RMS) can reach 0.000 4 λ. Under 100 mm measurement diameter, the measurement repeatability of PV10 can reach 0.000 8 λ, and that of RMS can reach 0.000 16 λ. Finally, the experimental results show that the system ensures the superior measurement efficiency and repeatability, which provides reference value for the research and development of dual-optical path interferometers.

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    Xu JIA, Sen HAN, Quanying WU. Design of control system for double optical path interferometry[J]. Journal of Applied Optics, 2023, 44(4): 842

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    Paper Information

    Category: Research Articles

    Received: Sep. 19, 2022

    Accepted: --

    Published Online: Aug. 10, 2023

    The Author Email:

    DOI:10.5768/JAO202344.0403005

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