Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1923001(2023)

Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference

Nan Zhang* and Rui Yin
Author Affiliations
  • School of Information Science and Engineering, Shandong University, Qingdao 266237, Shandong , China
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    We present a large range pressure sensor based on asymmetric Mach-Zehnder interference (AMZI) and a three-dimensional (3D) printed stereolithography resin module. The filtering characteristic is analyzed, and formulas show that the sensor's sensitivity is proportional to the length of one arm and inversely proportional to the diffraction order. In our design, high sensitivity is realized by a small diffraction order. The AMZI pressure sensor is fabricated using planar lightwave technology, and the pressure block is 3D printed with resin (DM11). The measured sensitivity is 0.3047 nm/MPa.

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    Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001

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    Paper Information

    Category: Optical Devices

    Received: Mar. 28, 2022

    Accepted: Jun. 17, 2022

    Published Online: Sep. 28, 2023

    The Author Email: Zhang Nan (znan@sdu.edu.cn)

    DOI:10.3788/LOP221128

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