Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1923001(2023)
Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference
We present a large range pressure sensor based on asymmetric Mach-Zehnder interference (AMZI) and a three-dimensional (3D) printed stereolithography resin module. The filtering characteristic is analyzed, and formulas show that the sensor's sensitivity is proportional to the length of one arm and inversely proportional to the diffraction order. In our design, high sensitivity is realized by a small diffraction order. The AMZI pressure sensor is fabricated using planar lightwave technology, and the pressure block is 3D printed with resin (DM11). The measured sensitivity is 0.3047 nm/MPa.
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Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001
Category: Optical Devices
Received: Mar. 28, 2022
Accepted: Jun. 17, 2022
Published Online: Sep. 28, 2023
The Author Email: Zhang Nan (znan@sdu.edu.cn)