Chinese Optics Letters, Volume. 7, Issue 4, 286(2009)

Reverse current reduction of Ge photodiodes on Si without post-growth annealing

Sungbong Park, Shinya Takita, Yasuhiko Ishikawa, Jiro Osaka, and Kazumi Wada
Author Affiliations
  • Department of Materials Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan
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    A new approach to reduce the reverse current of Ge pin photodiodes on Si is presented, in which an i-Si layer is inserted between Ge and top Si layers to reduce the electric field in the Ge layer. Without post-growth annealing, the reverse current density is reduced to ~10 mA/cm2 at -1 V, i.e., over one order of magnitude lower than that of the reference photodiode without i-Si layer. However, the responsivity of the photodiodes is not severely compromised. This lowered-reverse-current is explained by band-pinning at the i-Si/i-Ge interface. Barrier lowering mechanism induced by E-field is also discussed. The presented “non-thermal” approach to reduce reverse current should accelerate electronics-photonics convergence by using Ge on the Si complementary metal oxide semiconductor (CMOS) platform.

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    Sungbong Park, Shinya Takita, Yasuhiko Ishikawa, Jiro Osaka, Kazumi Wada. Reverse current reduction of Ge photodiodes on Si without post-growth annealing[J]. Chinese Optics Letters, 2009, 7(4): 286

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    Paper Information

    Received: Feb. 10, 2009

    Accepted: --

    Published Online: Feb. 1, 2010

    The Author Email:

    DOI:10.3788/COL20090704.0286

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