Infrared and Laser Engineering, Volume. 48, Issue 3, 306007(2019)
Study on microstructure of two-photon fabrication and assembly
In recent years, with the rapid development of technology in the fields of microelectromechanical systems, micromedical treatment and tissue engineering, micro-operation technology has attracted extensive attention from scientific research and industry, it plays a vital role in the miniaturization, functionalization and manufacture of integrated devices for future micro-nano technologies. Microstructures are fabricated using femtosecond laser two-photon polymerization, whose size is at the microscopic scale, the texture is brittle, the adhesion is large and the scale effect is significant, the surface force of the microstructure gradually replaces gravity to dominate. These factors further increase the difficulty of micro-operations. Therefore, a microoperating device based on capillary action of glass capillary tube was proposed, which used the capillary force to pick up and move the microstructure, and then assembled the different microstructures together. The method can assemble not only micro-originals, but also micro-devices with different materials and different characteristics to form a complex mixed microstructure.
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Xia Jintao, Zhang Chao, Tao Weidong, Wang Gang. Study on microstructure of two-photon fabrication and assembly[J]. Infrared and Laser Engineering, 2019, 48(3): 306007
Category: 激光技术及应用
Received: Oct. 18, 2018
Accepted: Nov. 20, 2018
Published Online: Apr. 6, 2019
The Author Email: Jintao Xia (13345961994@163.com)