Acta Optica Sinica, Volume. 32, Issue 10, 1031004(2012)
Model of Stress Evolution in Polycrystalline Oxide and Composite Thin Films
A model in terms of relaxation process of film structure is developed for stress evolution in polycrystalline thin films. And the growth stress model of composite films is given by linear combination. HfO2 film, SiO2 film and a composite film are prepared by electron-beam evaporation. And stress evolution is obtained by in situ wafer curvature measurement. All experimental results are analyzed through model fitting.
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Li Jingping, Fang Ming, He Hongbo, Shao Jianda, Fan Zhengxiu, Li Zhaoyang. Model of Stress Evolution in Polycrystalline Oxide and Composite Thin Films[J]. Acta Optica Sinica, 2012, 32(10): 1031004
Category: Thin Films
Received: Apr. 20, 2012
Accepted: --
Published Online: Jul. 17, 2012
The Author Email: Jingping Li (jingpingli1986@gmail.com)