Acta Optica Sinica, Volume. 15, Issue 4, 480(1995)

High Accuracy and Large Aperture Optical Standard ──Phase Shifting Digital Flat Interferometer

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    This paper describes a large aperture-high accuracy phase shifting digital flat interferometer which is a combination of optics,mechanics,electricity and algorithm.Its aperture is 245 mm and liquid surface is used as absolute flat to eliminate systemic error.The accuracy is better than λ/50 (λ= 0. 6328 μm peak-to-valley value). The tested aperture can be enlarged to 500 mm.This interferometer will be used as an optical flat standard instrument.The optical interfermeter,phase shifter and calibration of precision are discussed.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. High Accuracy and Large Aperture Optical Standard ──Phase Shifting Digital Flat Interferometer[J]. Acta Optica Sinica, 1995, 15(4): 480

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 16, 1993

    Accepted: --

    Published Online: Aug. 17, 2007

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    DOI:

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