Optics and Precision Engineering, Volume. 30, Issue 17, 2094(2022)

Mini-piezo-element drive microactuator based on triangular amplification

Yifan HU... Haijun ZHANG* and Kaijia NI |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou310027, China
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    This paper proposes a mini-piezo-element drive microactuator based on triangular amplification. The actuator is composed of two 1.6 mm×1.6 mm×5.0 mm mini piezo-elements, two triangular waists serving as symmetrical stretch arms, and one large apex flexure hinge (scanning end). When both stretch arms are driven by the mini-piezo-elements an amplified output displacement on the scanning end can be obtained through triangular amplification. Theoretical analysis and finite element simulation show that when the angle between each triangular stretch arm and the bottom edge is 6°, the ratio of the displacement at the scanning end to the expansion at the mini-piezo-element’s approaches 9∶1. Furthermore, the simulation results show that compared with the displacement of the mini-piezo-element of 3.2 μm, under 80 V driving voltage, the displacement of the scanning end can be enlarged to 29.5 μm. Micro-motion measurement experiments were conducted under the same driving voltage, and the displacement of the scanning end was measured as 26.6 μm, with an actual amplification ratio of 8.3. The proposed mini-piezo-element drive microactuator was successfully employed as the slow axis scanner of an atomic force microscope (AFM) and for wide-range AFM imaging (4 μm×26 μm). In conclusion, the proposed microactuator is a novel, simple structure that yields good results at low cost and is expected to be widely applied in optics, precision machinery, and micro/nano technology.

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    Yifan HU, Haijun ZHANG, Kaijia NI. Mini-piezo-element drive microactuator based on triangular amplification[J]. Optics and Precision Engineering, 2022, 30(17): 2094

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: May. 9, 2022

    Accepted: --

    Published Online: Oct. 20, 2022

    The Author Email: ZHANG Haijun (zhanghj@zju.edu.cn)

    DOI:10.37188/OPE.20223000.0223

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