Semiconductor Optoelectronics, Volume. 43, Issue 3, 461(2022)

Growth and Characterization of Nonpolar aplane nAlGaN Epitaxial Layer

FANG Ruiting... CHEN Shuai, ZHANG Xiong and CUI Yiping |Show fewer author(s)
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    The Sidoped nonpolar aplane nAlGaN epitaxial layer with high electron concentration and good surface morphology was successfully grown on semipolar sapphire substrate by metal organic chemical vapor deposition. The effects of indium (In) surfactant and undoped AlGaN buffer layer on the structural and electrical properties of the nAlGaN epitaxial layer were intensively studied. The characterization results show that the anisotropy in crystalline quality of the nonpolar aplane nAlGaN epitaxial layer is effectively suppressed by using In surfactant and undoped AlGaN buffer layer, and its surface morphology and electrical properties are significantly improved. In fact, the electron concentration and electron mobility are determined to be -4.8×1017cm-3 and 3.42cm2/(V·s), respectively.

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    FANG Ruiting, CHEN Shuai, ZHANG Xiong, CUI Yiping. Growth and Characterization of Nonpolar aplane nAlGaN Epitaxial Layer[J]. Semiconductor Optoelectronics, 2022, 43(3): 461

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    Paper Information

    Special Issue:

    Received: May. 26, 2022

    Accepted: --

    Published Online: Aug. 1, 2022

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022052601

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