Semiconductor Optoelectronics, Volume. 43, Issue 3, 461(2022)
Growth and Characterization of Nonpolar aplane nAlGaN Epitaxial Layer
The Sidoped nonpolar aplane nAlGaN epitaxial layer with high electron concentration and good surface morphology was successfully grown on semipolar sapphire substrate by metal organic chemical vapor deposition. The effects of indium (In) surfactant and undoped AlGaN buffer layer on the structural and electrical properties of the nAlGaN epitaxial layer were intensively studied. The characterization results show that the anisotropy in crystalline quality of the nonpolar aplane nAlGaN epitaxial layer is effectively suppressed by using In surfactant and undoped AlGaN buffer layer, and its surface morphology and electrical properties are significantly improved. In fact, the electron concentration and electron mobility are determined to be -4.8×1017cm-3 and 3.42cm2/(V·s), respectively.
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FANG Ruiting, CHEN Shuai, ZHANG Xiong, CUI Yiping. Growth and Characterization of Nonpolar aplane nAlGaN Epitaxial Layer[J]. Semiconductor Optoelectronics, 2022, 43(3): 461
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Received: May. 26, 2022
Accepted: --
Published Online: Aug. 1, 2022
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