Chinese Optics Letters, Volume. 11, Issue s1, S10606(2013)

Multilayers with high-reflectivity at 19.5 nm and low-reflectivity at 30.4 nm

Li Jiang, Jingtao Zhu, Zhong Zhang, Zhanshan Wang, Michael Trubetskov, and Alexander V. Tikhonravov

The multilayer (ML) mirror with high-reflectivity (HR) at a specific emission line of 19.5 nm (Fe line) and low-reflectivity (LR) at 30.4 nm (He line) is needed to be designed and fabricated for observing the image of sun. Based on a variety of optimizations utilized different structures, the design is performed and the final results demonstrate that the reflectivity at 30.4 nm does not achieve minimum value when the reflectivity at 19.5 nm reaches the maximum value. The tradeoff should be done between the HR at 19.5 nm and LR at 30.4 nm. One optimized mirror is fabricated by direct current magnetron sputtering and characterized by grazing-incident X-ray diffraction (XRD) and synchrotron radiation (SR). The experimental results demonstrate that the ML achieves the reflectivity of 33.3% at 19.5 nm and of 9.6 \times 10-4 at 30.4 nm at the incident angle of 13.

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Li Jiang, Jingtao Zhu, Zhong Zhang, Zhanshan Wang, Michael Trubetskov, Alexander V. Tikhonravov. Multilayers with high-reflectivity at 19.5 nm and low-reflectivity at 30.4 nm[J]. Chinese Optics Letters, 2013, 11(s1): S10606

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Paper Information

Category: Duv/euv coatings

Received: Dec. 6, 2012

Accepted: Dec. 26, 2012

Published Online: Jun. 10, 2013

The Author Email:

DOI:10.3788/col201311.s10606

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