Development of Z axis for a new nano-CMM

Optics and Precision Engineering, Volume. 13, Issue z1, 138(2005)

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[in Chinese], [in Chinese], [in Chinese]. Development of Z axis for a new nano-CMM[J]. Optics and Precision Engineering, 2005, 13(z1): 138

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Received: Jul. 20, 2005

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Published Online: Nov. 3, 2006

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