This paper reviews the advances in fabricating large-aperture Beam Sampling Grating (BSG) made of fused silica for Shenguang laser facility. A chemical mechanical polishing process for large-aperture BSGs is proposed. The efficiency uniformity of BSGs with an aperture of 430 mm× 430 mm is successfully controlled within a rms of 5% , which meets the specification of the large-aperture BSGs. For threshold characteristics of BSGs, the contamination and its cleaning of large-aperture BSGs are characterized with second ion mass spectroscopy quantitatively, and the cleaning flow of BSGs is developed and optimized. To remove the subsurface damage of fused silica, the fused silica substrate processing based on hydrofluoric acid and inductively coupled plasma etching is investigated. For improving the laser-induced damage threshold of the BSGs, it suggests that the HF acid etching method for large-aperture fused silica BSGs and the preparation method for BSGs integrated with sub-wavelength antireflection gratings should be developed in the future.