Acta Optica Sinica, Volume. 30, Issue 7, 1891(2010)

Study on Ellipsometric Spectra of Silicon Nanocrystals

Zhang Rongjun*, Lu Weijie, Cai Qingyuan, Yu Xiang, Zhou Weixi, Zheng Yuxiang, and Chen Liangyao
Author Affiliations
  • [in Chinese]
  • show less

    Silicon nanocrystals (nc-Si) quantum dots is one of the most promising and important fields in the research and application of Si luminescence nowadays. The nc-Si embedded in SiO2 thin film is grown on Si substrate by using thermal evaporation method. Strong photoluminescence of nc-Si is observed. The films are investigated by spectroscopic ellipsometer in the visible region at room temperature. Employing the effective-medium approximation (EMA) model combined with the Lorentz oscillator model in the ellipsometric parameters fitting,the optical constants of nc-Si with the sizes of 3 nm and 5 nm are obtained,respectively,in the spectral region from 300 nm to 830 nm. The data obtained will be helpful for the design and manufacture of Si-based micro-nanophotonic devices.

    Tools

    Get Citation

    Copy Citation Text

    Zhang Rongjun, Lu Weijie, Cai Qingyuan, Yu Xiang, Zhou Weixi, Zheng Yuxiang, Chen Liangyao. Study on Ellipsometric Spectra of Silicon Nanocrystals[J]. Acta Optica Sinica, 2010, 30(7): 1891

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: OPTOELECTRONICS

    Received: Apr. 21, 2010

    Accepted: --

    Published Online: Jul. 13, 2010

    The Author Email: Rongjun Zhang (rjzhang@fudan.edu.cn)

    DOI:10.3788/aos20103007.1891

    Topics