Acta Optica Sinica, Volume. 30, Issue 7, 1891(2010)
Study on Ellipsometric Spectra of Silicon Nanocrystals
Silicon nanocrystals (nc-Si) quantum dots is one of the most promising and important fields in the research and application of Si luminescence nowadays. The nc-Si embedded in SiO2 thin film is grown on Si substrate by using thermal evaporation method. Strong photoluminescence of nc-Si is observed. The films are investigated by spectroscopic ellipsometer in the visible region at room temperature. Employing the effective-medium approximation (EMA) model combined with the Lorentz oscillator model in the ellipsometric parameters fitting,the optical constants of nc-Si with the sizes of 3 nm and 5 nm are obtained,respectively,in the spectral region from 300 nm to 830 nm. The data obtained will be helpful for the design and manufacture of Si-based micro-nanophotonic devices.
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Zhang Rongjun, Lu Weijie, Cai Qingyuan, Yu Xiang, Zhou Weixi, Zheng Yuxiang, Chen Liangyao. Study on Ellipsometric Spectra of Silicon Nanocrystals[J]. Acta Optica Sinica, 2010, 30(7): 1891
Category: OPTOELECTRONICS
Received: Apr. 21, 2010
Accepted: --
Published Online: Jul. 13, 2010
The Author Email: Rongjun Zhang (rjzhang@fudan.edu.cn)