Acta Optica Sinica, Volume. 42, Issue 5, 0512002(2022)

High-Precision Dynamic White-Light Interferometry

Shuxian Bi, Mingliang Duan, Yi Zong, Caiyun Yu, and Jianxin Li*
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science & Technology, Nanjing, Jiangsu 210094, China
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    White-light interferometry has the advantages of high accuracy and non-contact measurement, which is an important measurement method in the field of ultra-precision machining. To tackle the problem that white-light interferometry is easily affected by environmental vibration, dynamic vertical scanning interferometry (DVSI) is proposed. This method divides the white-light interferometric optical path into two imaging channels to generate a quasi-monochromatic light interferogram, which is phase-shifted synchronously with the white-light interferogram. We obtain the actual phase-shift scanning position by processing the quasi-monochromatic light interferogram through the phase-tilt iteration (PTI), after which the coherence peak of the white-light interference signal is located and the coarse topographic distribution is calculated. The local least square (LLS) is used to calculate the fine phase distribution. The coarse topographic distribution and fine phase distribution are combined to recover the three-dimensional topography of the tested sample. The method is verified through numerical simulation and experimental comparison, and the results show that the method has good vibration-resistant performance.

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    Shuxian Bi, Mingliang Duan, Yi Zong, Caiyun Yu, Jianxin Li. High-Precision Dynamic White-Light Interferometry[J]. Acta Optica Sinica, 2022, 42(5): 0512002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 9, 2021

    Accepted: Sep. 1, 2021

    Published Online: Mar. 8, 2022

    The Author Email: Li Jianxin (ljx@vip.163.com)

    DOI:10.3788/AOS202242.0512002

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