Chinese Journal of Quantum Electronics, Volume. 26, Issue 1, 39(2009)

Research on pulse charging excimer laser power supply

de-wen HUANG*... li-bing YOU, Xu LIANG and yin-shan YU |Show fewer author(s)
Author Affiliations
  • [in Chinese]
  • show less

    Based on the exciting technology of excimer laser used for semiconductor lithography, the charging process of pulse transformer is analyzed using the Laplace formula. It is validated that the coupling factor influences the charging time. The charging time is compressed when the coupling factor is close to 1 The discharge process of charging circuit combined with magnetic switches is introduced. A scheme for controlling the resonant charging is also proposed. The power supply designed can fulfi11 the charge process in 50μs

    Tools

    Get Citation

    Copy Citation Text

    HUANG de-wen, YOU li-bing, LIANG Xu, YU yin-shan. Research on pulse charging excimer laser power supply[J]. Chinese Journal of Quantum Electronics, 2009, 26(1): 39

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 20, 2008

    Accepted: --

    Published Online: May. 24, 2010

    The Author Email: de-wen HUANG (huangdw@mail.ustc.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics