Acta Photonica Sinica, Volume. 32, Issue 6, 661(2003)
The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Effect of Mirror Undulation on Optical Property of Si-base MEMS Optical Tunable Filter[J]. Acta Photonica Sinica, 2003, 32(6): 661