Optics and Precision Engineering, Volume. 27, Issue 12, 2571(2019)
Composite control of piezo-actuated stick-slip devices
A piezo-actuated stick-slip device, which consists of a micro-motion stage and a slider, can realize long-range motions with high resolution. Induced mechanical vibrations in the micro-motion stage impose an upper bound on the speed of the piezo-actuated stick-slip device. To address this issue, this study proposes a composite control scheme with active damping. First, the saw-tooth wave signal is filtered and made smoother. Then, a delayed position feedback controller is introduced to improve the damping of the micro-motion stage and mitigate its vibrations. Both tracking and feedforward controllers are designed to reduce the tracking errors and increase the control bandwidth. Finally, the proposed controller is implemented on the prototype of a piezo-actuated stick-slip rotational device. The experimental results show that, compared to a proportional integral controller, the proposed controller improves the control bandwidth from 32.7 to 1 466.5 Hz. In addition, compared to a conventional feedforward controller, the proposed controller under a 100-Hz saw-tooth wave signal with a duty cycle of 0.2 improves the angular velocity of the slider from 3.52 to 9.03 mrad/s. The device angular speed is improved significantly.
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XU Si-qiang, ZHU Xiao-bo, LIU Pin-kuan. Composite control of piezo-actuated stick-slip devices[J]. Optics and Precision Engineering, 2019, 27(12): 2571
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Received: Jul. 8, 2019
Accepted: --
Published Online: May. 12, 2020
The Author Email: Si-qiang XU (xusiqiang@sjtu.edu.cn)