Photonic Sensors, Volume. 4, Issue 4, 373(2014)

Design, Fabrication, and Measurement of Two Silicon-Based Ultraviolet and Blue-Extended Photodiodes

Changping CHEN1,2,3, Han WANG1,2, Zhenyu JIANG1,2, Xiangliang JIN1,2、*, and and Jun LUO4
Author Affiliations
  • 1Faculty of Materials, Optoelectronics and Physics, Xiangtan University, Xiangtan, 411105, China
  • 2Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on A Chip, Xiangtan, 411105, China
  • 3The forty-eighth Research Institute of China Electronics Technology Group Corporation, Changsha, 410111, China
  • 4Department of Precision Mechanical Engineering, Shanghai University, Shanghai, 200444, China
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    Two silicon-based ultraviolet (UV) and blue-extended photodiodes are presented, which were fabricated for light detection in the ultraviolet/blue spectral range. Stripe-shaped and octagon-ring-shaped structures were designed to verify parameters of the UV-responsivity, UV-selectivity, breakdown voltage, and response time. The ultra-shallow lateral pn junction had been successfully realized in a standard 0.5-μm complementary metal oxide semiconductor (CMOS) process to enlarge the pn junction area, enhance the absorption of UV light, and improve the responsivity and quantum efficiency. The test results illustrated that the stripe-shaped structure has the lower breakdown voltage, higher UV-responsicity, and higher UV-selectivity. But the octagon-ring-shaped structure has the lower dark current. The response time of both structures was almost the same.

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    Changping CHEN, Han WANG, Zhenyu JIANG, Xiangliang JIN, and Jun LUO. Design, Fabrication, and Measurement of Two Silicon-Based Ultraviolet and Blue-Extended Photodiodes[J]. Photonic Sensors, 2014, 4(4): 373

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    Paper Information

    Received: Apr. 23, 2014

    Accepted: Jun. 6, 2014

    Published Online: Dec. 8, 2014

    The Author Email: JIN Xiangliang (jinxl@xtu.edu.cn)

    DOI:10.1007/s13320-014-0199-7

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