Acta Optica Sinica, Volume. 34, Issue 4, 431001(2014)
Optical Character Study of Silicon Optical Films in Different Deposited Temperature
The optical character of optical thin films is the basis for the design and preparation of thin films. Silicon material is an important material of high refractive index at the infrared optical thin film. The changes of refractive index and extinction coefficient of amorphous silicon optical film in different deposition temperatures are studied. The results show that the silicon film has the maximum refractive index at 200 ℃, and the extinction coefficient decreases with temperature increases.
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Luo Haihan, Cai Qingyuan, Li Yaopeng, Liu Dingquan. Optical Character Study of Silicon Optical Films in Different Deposited Temperature[J]. Acta Optica Sinica, 2014, 34(4): 431001
Category: Thin Films
Received: Oct. 8, 2013
Accepted: --
Published Online: Mar. 25, 2014
The Author Email: Haihan Luo (haihan.luo@mail.sitp.ac.cn)