Acta Photonica Sinica, Volume. 35, Issue 10, 1547(2006)
Study on Eroding Speed of MgO films
In this paper,the wetting eroding properties of MgO films,used as sacrificial layer materials,was researched in H3 PO4 solution,including the transverse eroding speed and vertical eroding speed. The relationships between the eroding speed of MgO films in H3 PO4 solution and the temperature and concentration of H3PO4 solution were obtained,and the better technical parameters were obtained for the manufacturing of the MgO films graphs and the holding structure in which MgO is used as sacrificial layer materials.
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Cai Changlong, Liu Huan, Ma Weihong, Liu Weiguo. Study on Eroding Speed of MgO films[J]. Acta Photonica Sinica, 2006, 35(10): 1547