Acta Optica Sinica, Volume. 28, Issue 9, 1638(2008)
Finite Element Analysis and Measurement of a 20-Element Bimorph Deformable Mirror
Influence function is a key parameter to evaluate the capability of bimorph deformable mirrors in correcting aberrations. Influence functions of a 20-element bimorph deformable mirror are measured by Veeco interferometer and simulated by a finite element model. Compared with the measured data, simulated results come out a little smaller. But they are consistent in both shape and the location of peak. And the finite element model can predict the correction on 1~35 Zernike aberrations of the 20-element bimorph deformable mirror correctly, with errors smaller than 0.1. It is feasible to improve the bimorph deformable mirror by optimization of its finite element model.
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Ning Yu, Zhou Hong, Guan Chunlin, Rao Changhui, Jiang Wenhan. Finite Element Analysis and Measurement of a 20-Element Bimorph Deformable Mirror[J]. Acta Optica Sinica, 2008, 28(9): 1638