Chinese Optics Letters, Volume. 5, Issue s1, 145(2007)

Vertical cavity surface emitting lasers fabricated with pulsed anodic oxidation

[in Chinese]1,2, [in Chinese]1, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, and [in Chinese]1
Author Affiliations
  • 1State Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033
  • 2Graduate School of the Chinese Academy of Sciences, Beijing 100039
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    The technique of pulsed anodic oxidation is adopted in the fabrication of 980-nm bottom-emitting vertical-cavity surface-emitting lasers. A high-quality native oxide current blocking layer is formed with this method. A significant reduction of threshold current and a distinguished device performance are achieved. The threshold current of large aperture devices with active diameter up to 400 microns is as low as 0.45 A at room temperature, which is substantially lower than the lasers fabricated by SiO2 sputtering. The maximum continuous-wave output power is 0.83 W. The lasing peak wavelength is 990.2 nm, and the full width at half-maximum is 0.9 nm. Low lateral divergence angle of 15.3 deg. and vertical divergence angle of 13.8 deg. are obtained.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Vertical cavity surface emitting lasers fabricated with pulsed anodic oxidation[J]. Chinese Optics Letters, 2007, 5(s1): 145

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    Paper Information

    Received: Jan. 1, 1949

    Accepted: --

    Published Online: Jul. 15, 2007

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