This paper focuses on the fabrication of 3D micro-cavity molds. Based on micro Double-staged Laminated Object Manufacturing (DLOM) process, 3D micro-electrodes were fabricated by superimposing multilayer 2D micro-structures and they were applied to the micro Electrical Discharge Machining (EDM) to obtain a 3D micro-cavity mold. Firstly, 100 μm-thick Cu foils were cut by micro-EDM to obtain multilayer 2D micro-structures and then the 2D micro-structures were connected together to fit out 3D micro-electrodes through a vacuum pressure thermal diffusion welding. Under the conditions of a voltage of 80 V, a pulse frequency of 0.2 MHz, pulse width of 800 ns and a pulse interval 4 200 ns, the 3D micro-electrodes were applied to the micro-EDM and the 3D micro-cavity mold with high surface quality and a precise shape was obtained. In order to reduce the adverse impact of electrode wear on machining precision of the 3D micro-cavity mold, the 3D queue micro-electrodes were used to process the same 3D micro-cavity mold, by which the first electrode was for rough machining and the others for fine machining. On the basis of these studies, two kinds of 3D queue micro-electrodes were fabricated and the 3D micro-cavity molds with surface roughness of 0.48 μm were obtained through the Micro-EDM. As compared with the current scanning 3D micro-EDM process, the 3D micro-cavity molds fabricated could be obtained through up and down reciprocating method of the 3D queue micro-electrodes, showing a sample machining process and higher efficiency.