Acta Optica Sinica, Volume. 32, Issue 3, 313001(2012)
Opto-Fluidic Tactile Sensor Array by Laser Direct Writing
A tactile sensor element is designed and fabricated based on laser direct writing technology. A continuous measurement of external tactile pressure is achieved by using an optical microfluidic structure. The tactile sensing element is fabricated using ultraviolet laser direct writing technology combining with a high-precision translation stage, and the overall process time is within 3 min. Experimental results show that the relation between external pressure and change in light intensity exhibits a smooth curve with a sensitivity of 0.995 mV/kPa. The array structure is designed and fabricated based on this sensing element, and it is capable of not only eliminating optical accumulated error, but also enhancing integration of optical tactile sensing into various applications.
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Li Xian, Yuan Yufeng, Li Shu, Lin Qiao, Fan Yuqiang, Wu Xingkun. Opto-Fluidic Tactile Sensor Array by Laser Direct Writing[J]. Acta Optica Sinica, 2012, 32(3): 313001
Category: Integrated Optics
Received: Jul. 21, 2011
Accepted: --
Published Online: Feb. 24, 2012
The Author Email: Xian Li (lixian0861@126.com)