Acta Optica Sinica, Volume. 24, Issue 8, 1141(2004)

High-Accuracy Angular Displacement Measurement Using Sinusoidal Phase-Modulating Fabry-Perot Interferometer

[in Chinese]* and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less

    A sinusoidal phase-modulating Fabry-Perot interferometer is proposed. A CCD image sensor is used for measuring the distance between the transmitted beams from the two faces of the Fabry-Perot plate. From the distance, the initial angle of incidence is calculated. The sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. It is insensitive to the external disturbance. Numerical calculation and experimental results make it clear that the interferometer allows high-accuracy measurements of angular displacements. The sensitivity is of the order of 10-8 rad.

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese]. High-Accuracy Angular Displacement Measurement Using Sinusoidal Phase-Modulating Fabry-Perot Interferometer[J]. Acta Optica Sinica, 2004, 24(8): 1141

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Physical Optics

    Received: Jun. 3, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (zhangcn@siom.ac.cn)

    DOI:

    Topics