Microlens Array Fabrication by Using Laser Direct Lithography System

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 16, Issue 8, 1194(1996)

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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Abstract Get PDF(in Chinese)

In the paper, the method for fabrication of diffractive microlens array using laser direct lithography system and reactive etching machine is described. The diffractive efficiency and the fabricating errors are analyzed. The microlens array has been used in a minature Shack Hartmann wavefront sensor.

Keywords

diffractive optical element microlens array laser direct lithography

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Microlens Array Fabrication by Using Laser Direct Lithography System[J]. Acta Optica Sinica, 1996, 16(8): 1194

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Paper Information

Category: Rapid communications

Received: Jun. 7, 1995

Accepted: --

Published Online: Dec. 4, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology