Laser & Optoelectronics Progress, Volume. 57, Issue 11, 111406(2020)

Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

Yucheng Bian1,2、**, Yulong Wang3, Yi Xiao4、***, Yinghui Zhang3, Yunlong Jiao3、*, Dong Wu3, Chenggang Zhou1,2, and Chengli Yao5
Author Affiliations
  • 1School of Microelectronics, University of Science and Technology of China, Hefei, Anhui 230026, China
  • 2Center for Micro-and Nanoscale Research and Fabrication, University of Science and Technology of China, Hefei, Anhui 230026, China
  • 3Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui 230026, China
  • 4School of Mechanical Engineering, Nantong Vocational University, Nantong, Jiangsu 226007, China
  • 5School of Chemistry and Chemical Engineering, Hefei Normal University, Hefei, Anhui 230601, China
  • show less

    Compared to traditional processing methods and other advanced micro/nano processing methods, femtosecond laser direct writing technology has certain advantages in controllable micro/nano processing, such as no mask, suitable for any material, and small thermal effect. Therefore, it is always used to prepare bionic micro/nano structure surfaces for applications in various fields such as self-cleaning, oil-water separation, and water mist collection. The formation mechanism and design ideas of preparing various micro/nano structures on different materials by femtosecond lasers are analyzed, and the latest research progress on the preparation of the bionic micro/nano structure surfaces by femtosecond laser is summarized. Then, the related concepts and theoretical models of surface wettability, controllable preparation of various micro/nano structures by femtosecond laser, and related industrial applications are explored. Finally, the difficulties and challenges of femtosecond laser processing technology in the field of micro/nano manufacturing are analyzed, and its future development in related fields is prospected.

    Tools

    Get Citation

    Copy Citation Text

    Yucheng Bian, Yulong Wang, Yi Xiao, Yinghui Zhang, Yunlong Jiao, Dong Wu, Chenggang Zhou, Chengli Yao. Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111406

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Lasers and Laser Optics

    Received: Mar. 18, 2020

    Accepted: Mar. 23, 2020

    Published Online: Jun. 2, 2020

    The Author Email: Bian Yucheng (bianyc@mail.ustc.edu.cn), Xiao Yi (SY052@mail.ustc.edu.cn), Jiao Yunlong (jyljjw@ustc.edu.cn)

    DOI:10.3788/LOP57.111406

    Topics