Experimental Research of XeCl Excimer Laser Excited by Magnetically Confined Discharge

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Quantum Electronics, Volume. 17, Issue 2, 150(2000)

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², [in Chinese]², and [in Chinese]²

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²[in Chinese]

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In this paper, the XeClexcimer laser excited by magnetically confined discharge is studied in both theory andexperiment, the results are compared and analyzed under the condition of Ar or He buffergas.

Keywords

Ar and He buffer gases magnetically confined excitation XeClexcimer laser

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Experimental Research of XeCl Excimer Laser Excited by Magnetically Confined Discharge[J]. Chinese Journal of Quantum Electronics, 2000, 17(2): 150

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Paper Information

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Received: May. 24, 1999

Accepted: --

Published Online: May. 15, 2006

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DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology