Acta Optica Sinica, Volume. 31, Issue 1, 112003(2011)

Investigation of Measurement Uncertainty of Aspheric Surface Based on Null-Computer-Generated HolographyWang Xiaopeng1,2Gao Zhishan1Ma Jun1Shen Hua1Ma Yun1

Wang Xiaopeng1,2、*, Gao Zhishan1,2, Ma Jun1,2, Shen Hua1,2, and Ma Yun1,2
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  • 2[in Chinese]
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    Aspheric surface acts as an important role in optical system. Because of its high precision, large data information and easy alignment, interferometric measurement method based on null computer-generated hologram (CGH) element is widely emphasized in the field of optical metrology and optical manufacture. A paraboloid acting as a special aspheric surface sample is measured in auto-collimated interferometric path by using flats and transmission spheres. Then error data are obtained by means of measuring the same sample with null-CGH in interferometric path. By the calculation of major error data, a conclusion that the measurement uncertainty can reach λ/10(λ=0.6328 μm)which meets the requirement of optical metrology if null-CGH is made in a flat of fused silica with enough thickness.

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    Wang Xiaopeng, Gao Zhishan, Ma Jun, Shen Hua, Ma Yun. Investigation of Measurement Uncertainty of Aspheric Surface Based on Null-Computer-Generated HolographyWang Xiaopeng1,2Gao Zhishan1Ma Jun1Shen Hua1Ma Yun1[J]. Acta Optica Sinica, 2011, 31(1): 112003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 10, 2010

    Accepted: --

    Published Online: Dec. 24, 2010

    The Author Email: Xiaopeng Wang (E-mail)

    DOI:10.3788/aos201131.0112003

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