Acta Optica Sinica, Volume. 31, Issue 1, 112003(2011)
Investigation of Measurement Uncertainty of Aspheric Surface Based on Null-Computer-Generated HolographyWang Xiaopeng1,2Gao Zhishan1Ma Jun1Shen Hua1Ma Yun1
Aspheric surface acts as an important role in optical system. Because of its high precision, large data information and easy alignment, interferometric measurement method based on null computer-generated hologram (CGH) element is widely emphasized in the field of optical metrology and optical manufacture. A paraboloid acting as a special aspheric surface sample is measured in auto-collimated interferometric path by using flats and transmission spheres. Then error data are obtained by means of measuring the same sample with null-CGH in interferometric path. By the calculation of major error data, a conclusion that the measurement uncertainty can reach λ/10(λ=0.6328 μm)which meets the requirement of optical metrology if null-CGH is made in a flat of fused silica with enough thickness.
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Wang Xiaopeng, Gao Zhishan, Ma Jun, Shen Hua, Ma Yun. Investigation of Measurement Uncertainty of Aspheric Surface Based on Null-Computer-Generated HolographyWang Xiaopeng1,2Gao Zhishan1Ma Jun1Shen Hua1Ma Yun1[J]. Acta Optica Sinica, 2011, 31(1): 112003
Category: Instrumentation, Measurement and Metrology
Received: May. 10, 2010
Accepted: --
Published Online: Dec. 24, 2010
The Author Email: Xiaopeng Wang (E-mail)