Acta Optica Sinica, Volume. 7, Issue 7, 618(1987)
Principle of a photometric ellipsometer compatible with null ellipsometer
A new-type photometric ellipsometer was built. Based on PQSA null ellipsometer., the compatible photometric ellipsometer replaces the fixed compensator by a rotating quarterwave plate. The principle is dissoussed in detail. It is a complete ellipsometer, which can determine the sign of A unambiguously, and it has the same sensitivity for the A even with linear polarized light. Experimental results are also reported.
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Wu QIHONG. Principle of a photometric ellipsometer compatible with null ellipsometer[J]. Acta Optica Sinica, 1987, 7(7): 618