Acta Optica Sinica, Volume. 11, Issue 7, 665(1991)
Nulling procedures used in the ellipsometry for anisotropic surface
This paper describes the nulling procedures used in the ellipsometry for anisotro pic surface (e.g., holographic grating) transformed into multi-step regulations from ideal two-step ones, if the orientation of two cartesian eigenvectors of the sample surface deviate a small angle from that of ellipsometer. The influence of this devation and its application are also discussed.
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[in Chinese]. Nulling procedures used in the ellipsometry for anisotropic surface[J]. Acta Optica Sinica, 1991, 11(7): 665