Chinese Journal of Lasers, Volume. 35, Issue 10, 1600(2008)
Influence of Three Post-Treatment Methods on Properties of ZrO2 Thin Films
Heat treatment with oxygen, laser conditioning and ion post-treatment were post processed respectively on ZrO2 single layers deposited by electron beam evaporation (EBE). Optical properties and laser-induce damage threshold (LIDT) of the films were studied. It is found that heat treatment can get rid of the hydrosphere adsorbed in the coating, offset the lost of oxygen in the deposition, which leads to a short shift of spectra curve, a decrease of absorption and an increase of LIDT. Laser pretreatment could wipe off the defects at a certain extent and increase the LIDT, but has no use in spectrum and absorption. And ion post-treatment could increase the stack density, lessen the defects, reduce the absorption and improve the LIDT. Each method has its own treat mechanism, and the most suitable method should be chosen according to the characteristics of the coatings.
Get Citation
Copy Citation Text
Wang Congjuan, Jin Yunxia, Shao Jianda, Fan Zhengxiu. Influence of Three Post-Treatment Methods on Properties of ZrO2 Thin Films[J]. Chinese Journal of Lasers, 2008, 35(10): 1600