Optics and Precision Engineering, Volume. 32, Issue 5, 740(2024)
Multispectral image fusion method for surface defect detection of IC devices
To address the issue of low defect detection accuracy in IC devices due to insufficient contrast under either visible light or infrared conditions alone, this paper introduces a multi-spectral fusion approach. Initially, to overcome scale inconsistency and contrast inversion challenges during IC device image registration, we enhance the ORB (Oriented FAST and Rotated BRIEF) algorithm with a Laplacian pyramid and feature descriptor recombination strategy. Following image registration, we propose the NSST_VP image fusion method, which processes the infrared and visible images' low and high frequency subbands through Non-Subsample Shearlet Transform (NSST). For fusion, the low frequency subband uses a visual significance map (VSM) weighted rule, and the high frequency subband employs a PA-Pulse Coupled Neural Network (PA-PCNN) decision rule, with the final image produced by reversing the NSST. The fused image is then analyzed using the YOLOv8s model. Experimental findings reveal an 87.8% average accuracy with the improved ORB registration, marking a 62% enhancement over the standard ORB. The NSST_VP fusion algorithm significantly boosts both subjective and objective metrics, achieving an mAP of 83.15%-surpassing single light mode detections by 22.97% and 28.31%, and outperforming Dual-Tree Complex Wavelet, Non-Subsampled Contourlet, and Curvelet Transform fusion methods by 13.14%, 15.01%, and 20.35%, respectively.
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Yaohua DENG, Zhihai HUANG. Multispectral image fusion method for surface defect detection of IC devices[J]. Optics and Precision Engineering, 2024, 32(5): 740
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Received: Oct. 5, 2023
Accepted: --
Published Online: Apr. 2, 2024
The Author Email: HUANG Zhihai (2112101013@mail2.gdut.edu.cn)