Infrared and Laser Engineering, Volume. 45, Issue 1, 105001(2016)

Research of compact excimer laser for producing FBG

Zhang Wei, Liang Xu, Tao Ruhua, and Fang Xiaodong
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  • [in Chinese]
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    248 nm KrF excimer lasers have important applications in many areas such as photoetching and scientific research. The excimer laser for writing Fiber Bragg Grating was developed. The mechanical structure was designed and improved, and the key technologies including uniform discharge and preionization were analyzed. The laser performance was optimized by studying the impact of the charging voltage, the gas mixture and the total gas pressure on output energy and efficiency. The beam profile homogeneity, beam divergence angle and energy stability were measured and calculated. The repetition rate of the excimer laser is 1-50 Hz, and the maximal output efficiency is about 2.0%, and the maximal single pulse output energy is up to 360 mJ. The instability of output energy is less than 1.8% with charge voltage above 24 kV. Writing Bragg Grating in optical fiber core with a static phase-mask by the above laser as light source, of which results were analyzed and discussed.

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    Zhang Wei, Liang Xu, Tao Ruhua, Fang Xiaodong. Research of compact excimer laser for producing FBG[J]. Infrared and Laser Engineering, 2016, 45(1): 105001

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    Paper Information

    Category: 激光器技术

    Received: May. 5, 2015

    Accepted: Jun. 3, 2015

    Published Online: Apr. 5, 2016

    The Author Email:

    DOI:10.3788/irla201645.0105001

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