Frontiers of Optoelectronics, Volume. 3, Issue 4, 408(2010)

Magnetorheological finishing of optical surface combined with symmetrical tool function

Haobo CHENG1,2、*, Yunpeng FENG1, Tan WANG1, and Zhichao DONG1
Author Affiliations
  • 1School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
  • 2Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Hong Kong, China
  • show less

    This research is aimed at the development of computer-aided polishing technology for optical surfaces using magnetorheological (MR) fluid as medium. The mechanism of a dual-axis polishing wheel and the mathematical model combined with a symmetrical tool function are demonstrated. The effects of speed, gap, time and geometric parameters of the tool have been experimentally evaluated by polishing a parabolic BK7 mirror in 120 mm diameter. The surface topography presented an obvious amelioration, and the shape accuracy decreased to 0.067l from 0.519l (l = 632.8 nm, RMS) after 75 min finishing.

    Tools

    Get Citation

    Copy Citation Text

    Haobo CHENG, Yunpeng FENG, Tan WANG, Zhichao DONG. Magnetorheological finishing of optical surface combined with symmetrical tool function[J]. Frontiers of Optoelectronics, 2010, 3(4): 408

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Sep. 27, 2010

    Accepted: Oct. 25, 2010

    Published Online: Sep. 20, 2012

    The Author Email: CHENG Haobo (chenghaobo@tsinghua.org.cn)

    DOI:10.1007/s12200-010-0127-4

    Topics