Frontiers of Optoelectronics, Volume. 3, Issue 4, 408(2010)
Magnetorheological finishing of optical surface combined with symmetrical tool function
This research is aimed at the development of computer-aided polishing technology for optical surfaces using magnetorheological (MR) fluid as medium. The mechanism of a dual-axis polishing wheel and the mathematical model combined with a symmetrical tool function are demonstrated. The effects of speed, gap, time and geometric parameters of the tool have been experimentally evaluated by polishing a parabolic BK7 mirror in 120 mm diameter. The surface topography presented an obvious amelioration, and the shape accuracy decreased to 0.067l from 0.519l (l = 632.8 nm, RMS) after 75 min finishing.
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Haobo CHENG, Yunpeng FENG, Tan WANG, Zhichao DONG. Magnetorheological finishing of optical surface combined with symmetrical tool function[J]. Frontiers of Optoelectronics, 2010, 3(4): 408
Received: Sep. 27, 2010
Accepted: Oct. 25, 2010
Published Online: Sep. 20, 2012
The Author Email: CHENG Haobo (chenghaobo@tsinghua.org.cn)