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Chinese Optics Letters, Volume. 14, Issue 4, 043501(2016)

Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum

Jun Cheng1 and Duk-Yong Choi2
Author Affiliations
  • 1School of Electromechanical Engineering, Beijing Institute of Technology, Beijing1 00081 , China
  • 2Centre for Ultrahigh bandwidth Devices for Optical Systems, Laser Physics Centre, Research School of Physics and Engineering, The Australian National University, Canberra, ACT2 601, Australia
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    Jun Cheng, Duk-Yong Choi. Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum[J]. Chinese Optics Letters, 2016, 14(4): 043501

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    Paper Information

    Category: Other Areas of Optics

    Received: --

    Accepted: --

    Published Online: Apr. 12, 2016

    The Author Email:

    DOI:10.3788/col201614.043501

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology