Acta Optica Sinica, Volume. 5, Issue 5, 428(1985)
An opto-heterodyne sine-ruler-type angle-measuring interferometer
This paper describes an opto-hetorodyne sine-ruler-type angle-measuring interferometer. It used a frequency-stabilized transverse Zeeman laser (STZL) as the light source. A method of sensitivity calibration for angle measurement is presented. Hysterisis characteristics of a PZT piezoelectric ceramic have been measured by using this angle-measuring interferometer.
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YE SHENGXIANG. An opto-heterodyne sine-ruler-type angle-measuring interferometer[J]. Acta Optica Sinica, 1985, 5(5): 428