Acta Optica Sinica, Volume. 15, Issue 10, 1441(1995)
A New Design of Soft X-Ray Transmission-Blazed Grating with Ultrahigh Density (105l/mm)
A new method of fabricating transmission-blazed grating with period' s thickness of 10 nm or below by magnetron sputtering is proposed for the first time. The transmission-blazed grating model based on total reflection by inner interfaces is presented. Two examples of this grating used in water window are given, for example, angular dispersivie power 5.7 deg./nm; energy resolution λ/△λ≈104. LiF and LiBO2 etc. with high transmissivty are considered suitable for the grating' spacer material. Possible applications are discussed.
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[in Chinese], [in Chinese]. A New Design of Soft X-Ray Transmission-Blazed Grating with Ultrahigh Density (105l/mm)[J]. Acta Optica Sinica, 1995, 15(10): 1441